Plasma sheath structures around a radio frequency antenna
نویسندگان
چکیده
منابع مشابه
Sheath Reversal During Transient Radio-Frequency Bias
Optical imaging is performed with temporal and spatial resolution in a capacitively coupled plasma. The region imaged is in front of an RF biased planar probe embedded in the center of the ground electrode of a standard Gaseous Electronics Conference (GEC) reference cell. Two main periods of interest stand out. The local sheath induced by the biasing and the main plasma bulk are affected. The f...
متن کاملEvolution of a dust void in a radio-frequency plasma sheath.
The onset and growth of a dust void are investigated in a radio-frequency (rf) sheath of a capacitively coupled argon plasma. A circularly symmetric void emerges and grows with increasing rf power and pressure in the central region of the dust cloud levitating in the sheath. Experimental measurements of the void diameter are compared with the predictions of a simple phenomenological theory, bas...
متن کاملTemporally resolved ion velocity distribution measurements in a radio-frequency plasma sheath
The ion velocity distribution function (IVDF) above and within a radio-frequency (RF) biased plasma sheath is studied experimentally with a pulsed laser-induced fluorescence diagnostic in an industrial plasma etch tool. Temporally resolved measurements taken at eight different phases of the 2.2 MHz bias waveform show that the ion dynamics vary dramatically throughout the RF cycle (the ratio of ...
متن کاملEmissive sheath measurements in the afterglow of a radio frequency plasma
Articles you may be interested in Negative plasma potential in a multidipole chamber with a dielectric coated plasma boundary Measurement of plasma-surface energy fluxes in an argon rf-discharge by means of calorimetric probes and fluorescent microparticles Time-resolved measurements of the E-to-H mode transition in electronegative pulse-modulated inductively coupled plasmas Time evolution of e...
متن کاملResonance cone interaction with a self-consistent radio-frequency sheath.
We study the propagation of lower-hybrid-type resonance cones in a tenuous magnetized plasma, and, in particular, their interaction with, and reflection from, the plasma sheath near a conducting wall. The sheath is modeled as a vacuum gap whose width is given by the Child-Langmuir law. The application of interest is when the resonance cones are launched (parasitically) by an ion-cyclotron radio...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Geophysical Research: Space Physics
سال: 2008
ISSN: 0148-0227
DOI: 10.1029/2008ja013097